Metrology and Testing

SEM

Equipment includes:

Helium / Neon / Gallium Ion Microscope: Bay 3 provides access to a helium / neon / gallium ion microscope delivering sub-nanometre-resolution imaging with exceptional surface sensitivity and depth of field. The system supports high-resolution imaging of insulating samples without conductive coating and enables nanoscale milling and ion-beam lithography with reduced implantation damage. Cryogenic capability, in situ micromanipulation, and platinum deposition support advanced modification and cross-sectional workflows.

SEM LEO 1530VP with Oxford Instruments EDS: The LEO 1530VP field emission scanning electron microscope (FE-SEM), equipped with an Oxford Instruments energy dispersive X-ray spectroscopy (EDS) system, provides high-resolution surface imaging and elemental analysis. The system enables nanometre-scale morphological characterisation with accelerating voltages up to approximately 30 kV and supports qualitative and semi-quantitative elemental analysis through EDS. It is suitable for micro- and nanostructural investigation of conductive and non-conductive materials in materials science, microfabrication, and bioelectronics research.

Zeiss Axio Lab A1 Optical Microscope: The Zeiss Axio Lab A1 optical microscope provides high-resolution optical inspection for lithographic process verification. The system enables evaluation of feature size, alignment accuracy, edge definition, and pattern integrity. Brightfield and contrast-enhanced imaging modes support rapid inspection during process development. The microscope is used for routine quality control, documentation, and failure analysis. This capability enables rapid feedback and iteration during fabrication.

Dektak XT Stylus Profilometer: The Dektak XT provides accurate measurement of thin-film thickness, step height, and surface topography using a contact-based stylus profilometry method. The system supports quantitative process monitoring and verification. Measurements enable rapid feedback during deposition process development. The tool supports both research and quality-control workflows. It is essential for thickness calibration and process reproducibility.

Zetasizer Nano ZS: The Zetasizer Nano ZS provides particle size, zeta potential, and molecular weight measurements using dynamic light scattering (DLS), electrophoretic light scattering (ELS), and static light scattering (SLS) techniques. The system enables characterisation of nanoparticles, colloids, polymers, and biomolecular systems in liquid media, with typical particle size measurements ranging from sub-nanometre scale (~0.3 nm) up to approximately 10 µm, depending on sample type. Zeta potential measurements support analysis of surface charge and dispersion stability across a broad range of aqueous and non-aqueous systems. The instrument is suitable for materials science, nanotechnology, and biointerface research workflows. 

FTIR PerkinElmer with Universal ATR and Spotlight 400 FT-IR Microscope: The PerkinElmer FTIR system, equipped with a Universal ATR sampling accessory and Spotlight 400 FT-IR Microscope, enables chemical characterisation through mid-infrared spectroscopy. The system operates across the mid-IR spectral range (typically ~7800–600 cm⁻¹) and supports both bulk ATR measurements and spatially resolved FT-IR microscopy. The microscope enables chemical imaging with micrometre-scale spatial resolution, supporting functional group identification and compositional mapping of polymers, thin films, biomaterials, and surface-modified samples in research and quality-control workflows.

Q-Sense E4 System: The Q-Sense E4 Quartz Crystal Microbalance system enables real-time monitoring of interfacial mass adsorption and viscoelastic properties of thin films. The system detects nanogram-level mass changes per unit area and simultaneously measures energy dissipation to characterise mechanical properties of soft and rigid layers in liquid environments. It supports studies of biomolecular interactions, surface functionalisation, coatings, and soft materials under static or flow conditions.